Bruker DektakXT Stylus Profilometer

Description

• Better than 5 Å step height repeatability
• Up to 1mm measurement range
• 50 µm to 55 mm scan length
• Low inertia sensor with 1 to 15 mg of force
• 2 and 12.5 µm radius stylus tips
• Surface topography, waviness, and roughness measurement capability
• 2D stress measurement capability
• Substrates up to 6"