Diamond Foundry

In support of the NSF Quantum Foundry, the QSF houses a suite of tools for diamond film growth and defect engineering. Included in this suite are CVD tools for deposition and in-situ doping of high purity single crystal diamond, a tunable-energy electron gun irradiation tool for vacancy creation, and a reactive ion etcher (RIE) dedicated to diamond-only etching for fabrication of nanostructures and photonic/phononic devices.

 How-to Information

Steps to Access the Quantum Structures Facility
  1. Contact QSF staff to get trained on the instrument.
  2. Apply to CNSI for electronic door access to the facility.
  3. QSF Staff will add you to the FBS reservation system
Acknowledging Support

Please remember to acknowledge CNSI resources in scientific publications and presentations by including this statement:

“The authors acknowledge the use of the Quantum Structures Facility within the California NanoSystems Institute, supported by the University of California, Santa Barbara and the University of California, Office of the President.”

For work related to the Quantum Foundry also include:

"This work is supported by the National Science Foundation through Enabling Quantum Leap: Convergent Accelerated Discovery Foundries for Quantum Materials Science, Engineering and Information (Q-AMASE-i) award number DMR-1906325."

 Contact

Specialist
Lab Manager
Quantum Structures Facility and Confocal Microscope and Spectroscopy Facility

 Equipment

Ultrapure Diamond CVD with available Nitrogen doping.
Microwave plasma chemical vapor deposition (CVD) for growth of high-quality homoepitaxial diamond thin films.
PCT electron beam system for the bulk irradiation of diamond samples to create vacancies and enhance nitrogen-vacancy center formation.
Reactive ion etcher (RIE) is dedicated for diamond-only etching to create nanostructures and photonic/phononic devices in diamond.